Holographic Interferometer for 3D Surface Profiling

Daping Chu

Principal Investigator

Tenured Professor of the University of Cambridge, the Director of Centre for Advanced Photonics and Electronics (CAPE), the Director of Centre for Photonic Devices and Sensors (CPDS), the Academic Director and CEO of the CUNJC, and a guest professor at many domestic universities such as Tsinghua University, Nanjing University and 
Southeast University.

Deng Yuanbo

Co-PI

Led by Professor Daping Chu, Tenured Professor of University of Cambridge, Director of Cambridge Centre for Advanced Photonics and Electronics (CAPE) and the Centre for Photonic Devices and Sensors, the project relies on the Centre to explore the integration of pure phase liquid crystal on silicon (LCOS) technology into the interferometer to relax the tolerance of its hardware optical system, which is compensated by computer-generated holograms, thereby reducing equipment costs.

 

The architecture proposed in this project will be able to use low-cost optical and optomechanical components without affecting system performance. In addition, the generated interferogram will also become less complex and can be processed at high speed.

 

The research result of this project is expected to be widely applied to various surface inspection scenarios in scientific research and industrial production, such as optical component inspection, integrated circuit inspection, micro-electromechanical device inspection, and biological cell inspection.